QuantumDiamonds GmbH, a Munich-based semiconductor equipment startup, has closed a €91 million funding round combining €15 million in equity and €76 million in non-dilutive support approved under the European Chips Act.

The equity round was led by World Fund, with participation from Bayern Kapital and existing investors including IQ Capital, Earlybird, First Momentum, UnternehmerTUM, Creator Fund, Onsight Ventures, and angel investors. The non-dilutive funding is being provided jointly by the German Federal Ministry for Economic Affairs and Energy and the Free State of Bavaria.

QuantumDiamonds develops quantum-based semiconductor inspection technology that uses defects in synthetic diamonds to detect magnetic fields for non-destructive 3D current imaging at the nanoscale. The company said the new funding will be used to scale production, deliver lab systems to leading chipmakers, and expand wafer-level capabilities for high-throughput fab inspection.

The deal underscores growing European backing for semiconductor tooling and inspection technologies as chipmakers look for new ways to identify defects in increasingly complex devices.